PR Newswire: Axcelis announced that it has received an order for its Optima HDx high current implanter from one of the world's largest device manufacturers. The first system shipped in September and will be used to enable production of leading edge CMOS image sensors.
The implanters of this sort are used for very low-energy implants like source-drain ones, PD pinning layer or backside passivation implant. According to Axcelis white paper the energy can go down to 7KeV.
The implanters of this sort are used for very low-energy implants like source-drain ones, PD pinning layer or backside passivation implant. According to Axcelis white paper the energy can go down to 7KeV.
