PRNewswire: Axcelis has received its first order for the Purion VXE, a new extended energy range model of Purion XE high energy implanter. The new system delivers the highest energy range in the Purion platform. The customer plans to use the 300mm Purion VXE to support R&D for image sensors in...
Axcelis to Supply Highest Energy Implanter to Image Sensor Foundry
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