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EETimes: "
We can now build a CMOS image chip for a cell-phone-sized camera module that sees in the terahertz range," said Ken O, a professor and lead researcher at UT Dallas. The key to integration of terahertz imager on-a-chip is the high-speed Schottky diodes fabricated in CMOS. "
We have figured out how to create high-speed Schottky diodes in CMOS without changing the process, just the layout," said O. "
We just take an active region where a transistor would normally go, and don't draw the source-drain implantation mask layer, resulting in a Schottky diode."
Even at design rules of 130nm used for the demonstration chip, the high-speed Schottky diodes were able to achieve THz-range performance without changing the standard CMOS processing steps.
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A one-pixel CMOS terahertz image chip (left) can see through solid objects, here showing the inner workings of an old-school floppy disk. |
The details are presented in a paper "
280GHz and 860GHz Image Sensors Using Schottky-Barrier Diodes in 0.13µm Digital CMOS," at the ISSCC this week in San Francisco.
Another similar paper at ISSCC is "
A 1kPixel CMOS Camera Chip for 25fps Real-Time Terahertz Imaging Applications" by STMicro, Crolles, France, University of Wuppertal, Wuppertal, Germany and IEMN / ISEN, Lille, France
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